Comparative Evaluation of High-Speed Bearingless Cross-Flow Fan Designs for Lithography Excimer Lasers

This study conducted a comparative evaluation of two bearingless cross-flow fan designs for applications in deep ultraviolet lithography excimer lasers, where maximizing the speed and power has direct influence on throughput scanning these devices. Using motor technology enables combined generation bearing force drive torque leads to compact, hermetically sealed, conveniently maintainable system. With identical motors both rotor sides, it is possible symmetrically high rotational speeds at low torsional loads. The prototypes were optimised, analysed, pushed high-speed operation evaluated with respect their dynamic fluid performance using finite element methods experimental measurements. For prototypes, successful numerical studies performed, modal analysis enabled theoretical predictions expected resonance frequencies, CFD visualised local flow effects provided design comparisons. A stable up 12,000 rpm 5500 was accomplished elaborated designs.